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A parallel-plate capacitor is suspended by two fixed-guided cantilever beams, each with length, width and thickness denoted L, W and t respectively as shown in figure. The material is polysilicon, with a Young’s modulus of 120 GPa (l = 400 µm, W = 10 µm and t = 1 µm). The gap Xo between two plates is 2 µm. The area of the plate is 400 µm by 400 µm. Calculate the safety voltage (maximum voltage) to be applied to ensure that the two plates do not touch each other. |
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Answer» bzbznxodjxkdkdixkdjdkd fndnxnExplanation:xnxnnxnsndnxndnxkxnxkxjdjdjdjfjxjd |
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